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Acoustic Transducer - Astrophysics Data System

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Last Updated: 03 November 2021

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A Low-Cost Fabrication and Numerical Simulation of a MEMS Acoustic Transducer Using Polyimide Membrane on FR4 Substrate

Micro-electromechanical system -based acoustic transducers are additionally recognized as microphones. The membrane layer materials on MEMS microphones are steel, silicon, polysilicon, and silicon nitride. The existing innovation and materials made use of for the microphones involve expensive materials and complex process actions. This paper recommended an inexpensive manufacture process and studies a MEMS acoustic transducer gadget making use of polyimide as a membrane on FR4 substrate. This device has four resistors which are linked in the method of Wheatstone bridge.

Source link: https://ui.adsabs.harvard.edu/abs/2021JEMat..50.6489K/abstract


A Low-Cost Fabrication and Numerical Simulation of a MEMS Acoustic Transducer Using Polyimide Membrane on FR4 Substrate

Micro-electromechanical system -based acoustic transducers are additionally called microphones. The membrane materials on MEMS microphones are metal, silicon, polysilicon, and silicon nitride. This paper proposed an inexpensive construction procedure and studies a MEMS acoustic transducer device using polyimide as a membrane on FR4 substratum. The mathematical simulation is carried out for the proposed gadget and considers the adhering to criteria such as density of membrane, diameter of diaphragm tooth cavity, resistor size and applied pressure.

Source link: https://ui.adsabs.harvard.edu/abs/2021JEMat.tmp..537K/abstract

* Please keep in mind that all text is summarized by machine, we do not bear any responsibility, and you should always check original source before taking any actions

* Please keep in mind that all text is summarized by machine, we do not bear any responsibility, and you should always check original source before taking any actions